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Program Application

Electron Microscopy Facilities

Instruments

  1. 300 keV HRTEM with FEG and GI

     

    FEATURES:

    • Electron Energy Loss Spectroscopy (EELS)
    • Chemical Imaging by energy filtering
    • 2.0 Angstrom point to point resolution
    • Compoisitional Analysis by Dispersive X-Ray Spectroscopy
    • Scanning TEM

  2. Amray 1860 FEG high resolution SEM

  3. JEOL 6700F Scanning Electron Microscope

     

    MICROSCOPE FEATURES:

    • Cold cathode Field emission gun
    • 1.0 nm resolution at 15 KV
    • 2.2 nm resolution at 1 KV
    • Backscatter Electron detector (compositional and topographical imaging)
    • EDX detector

  4. JEOL 8600 Electron Microprobe

     

    FEATURES:

    • Secondary and back-scattered electron imaging (~20 nm resolution)
    • Compositional analysis (by Energy dispersive and wavelengthdispersive spectroscopies)
    • Compositional mapping (by Energy dispersive and wavelengthdispersive spectroscopies)

  5. Philips 420T TEM

     

    FEATURES:

    • Compositional Analysis by Energy Dispersive X-ray Spectroscopy
    • 3.5 Angstrom point to point resolution

  6. Zeiss SEM and Electron Beam Lithography System