The Zeiss Auriga SEM combines SEM imaging with FIB capabilities. The live SEM imaging capability during FIB operation mode gives full control when micro-machining critical samples.

The Auriga series offers a multi-channel gas injection system for ion beam deposition of metals or insulators and for enhanced etching. A wealth of options exist on the NIAC system including a 5 gas injection system and a single high angle gas injector for 0 degree, an in situ micromanipulator, and SE, Inlens SE, Inlens BSE, STEM and EDS detectors.