Description

The NANOSPEC/AFT is a computerized film thickness measurement system. The Nanospec separateslight from a white source into its component wavelenths, from 480 to 800 nanometers. The interference of the light waves is tehn measured using several algorithms and thickness is determined. This instrument offers programs on thirteen specific film types, relative reflectance, and multipurpose thick film capability. A dielectric film in teh range of the instrument extends from less than 100A to 40,000A, with a reflectivity of +/-2% to +/-5%.