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Duke University - NC State University - UNC Chapel Hill - NCCU
Research Triangle MRSEC
Nanofabrication Facility (NNF)
Facility Primary Contact:
Mehmet Ozturk
Solarex
This tool is used to deposit thin silicon nitride layers.
News
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How NSF's Materials Research Facilities Network helps bolster the field of materials science and engineering
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MRFN.org is supported by the MRSEC Program of the National Science Foundation. Image in the header is courtesy of CRISP MRSEC.