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AJA Evaporation Chamber

Instrument types

The AJA Evaporation Chamber was donated to the REMRSEC by Zettacore, a local start-up company that worked in molecular electronics. It is currently set up to evaporate ionic liquids from crucibles that are heated by halogen lamps. Its substrate holder has rotation, vertical translation, heating to 800 C, and RF or DC bias. The machine has a turbo-pumped load lock and a cryo-pumped main chamber. REMRSEC's intention is to convert this machine into an e-beam evaporator.