The MRL x-ray facility has two Panalytical MRD PRO high-resolution x-ray diffractometers for measuring high quality epitaxial thin films grown on substrates, which include a wide variety of electronic, optoelectronic and photonic materials. The instruments are routinely used for high precision lattice parameter determination, rocking curves, super lattice from multilayers, glancing incidence x-ray diffraction and x-ray reflectivity. In its triple axes configuration, the instrument has an intrinsic resolution of ~5 arcsec, making them well suited for measurements on near perfect crystals.

Features

• X-ray sources: 18 kW Rigaku rotating anode
  generator & 2.2 kW Philips sealed tube source
• Wavelength: Cu Ka (1.5405 Ĺ)
• Monochromator: High flux hybrid monochromator or 4-crystal Ge(220)/(440)
• Diffracted beam optics: receiving slits & Ge (220) analyzer for triple axes
• Goniometer: open Eulerian cradle
• Detector: sealed proportional counter
• Resolution: ~5 arcsec in q and 2q-q scans
• Software for data acquisition: Philips X’PERT Data Collector
• Software for data processing: Philips X’PERT Epitaxy  

Example of XRD data collected on MRD

GaN (002) rocking curve with superlattice peaks

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