This dual-beam FIB/SEM allows simultaneous FIB milling and SEM imaging and is equipped with a STEM detector, Bruker Quantax SDD EDS detector, Omniprobe AutoProbe and Kleindiek nanomanipulation system. Capable of subnanometer SEM resolution at 15kV, <1.5nm at 1kV. The high current Sidewinder FIB column provides 5nm resolution at 30kV and low energy milling capabilities.
MRFN.org is supported by the MRSEC Program of the National Science Foundation. Image in the header is courtesy of CRISP MRSEC.
