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Northwestern University
Northwestern University Materials Research Science and Engineering Center
Materials Processing Microfabrication Cleanroom
Facility Primary Contact:
William Kung
Oxford Instruments P 80 Reactive Ion Etcher (RIE)
News
Shared instrumentation facilities: Benefiting researchers and universities, and sustaining research excellence
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How NSF's Materials Research Facilities Network helps bolster the field of materials science and engineering
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MRFN.org is supported by the MRSEC Program of the National Science Foundation. Image in the header is courtesy of CRISP MRSEC.