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FEI XL40 Sirion FEG Digital Scanning Microscope w/EDS

Instrument types

High resolution scanning electron microscope completely controlled under WindowNT. Equipped with a high stability Schottky field emission gun and a large specimen chamber (379x280 mm door size).  Oxford Inca x-ray system is attached. Back scattering detector for Z-imaging.

Voltage: 500-30keV; Resolution: 1.2 nm @30keV.